2016 ANNUAL REVIEW Ministry of Science and Technology

harvest the electricity produced by energy sources as small as vibrations and as large as solar panels, while also storing the energy obtained by the energy harvesting element on the same chip. As a result, the chip can be used in conjunction with various green energy systems, and is very suitable for application in many types of wearable or Internet of Things application systems. f. 0.8-65GHz load-pull measurement system Responding to wireless communications t echno l ogy deve l opmen t t r ends , CIC has established a non-50 Ohm impedance matching measurement environment for GSM (900, 1800MHz ) , Wi F i ( 2 . 4 , 5GHz ) , 5G mob i l e communications (10-40GHz), and millimeter wave (60GHz) bands, and developed a measurement s y s t em comb i n i ng non l i nea r pa r ame t e r s (X-Parameter). By facilitating the establishment of linear and nonlinear models of high frequency power element and amplifier circuits, etc., and enabling the measurement and verification of characteristic parameters, and detection and measurement of impedance mismatch circuits, this measurement technology will enable greater technological innovation in domestic next- generation wireless communications service. (2) Instrument Technology Research Center a. Blood images that can talk: Subcutaneous blood clot imaging system The Instrument Technology Research Center (ITRC) successfully developed a "subcutaneous blood clot imaging system" that can be used to detect and identify ordinarily-invisible subcutaneous blood clots during the initial period after an injury. This device overcomes the problem of the current blood oxygen concentration testing method in that it can only provide single-point information, and— 1mm x 1mm size of energy harvesting management chip in an international breakthrough—can detect the distribution of blood oxygen concentration over a large area (up to 8cm x 8cm) of skin. The device offers excellent sensitivity and usability, and can provide important supporting evidence when assessing the time of an injury. This system has been realized as a product by the cooperating firm Lumos Technology, has received a testimonial from the internationally well-known forensic scientist Dr. Henry Lee, and is being used by police in the United States. This is a powerful tool for assessment and acquisition of evidence in criminal cases, and we anticipate that it will be widely applied in criminal investigations in the future. b. Successful development of a 12" plasma-enhanced atomic layer deposition ITRC has collaborated with TSMC in the successful development of a 12" plasma-enhanced atomic layer deposition (PEALD) system. This system can quickly and evenly apply chemical precursors to the surface of 12" silicon wafers, while enhancing the evenness of chemical precursor application, avoiding the production of dust, and boosting film evenness. This design can enhance plasma reaction efficiency, reduce film damage, and achieve an even PEALD reaction. The system also allows the selection of film process methods via the replacement of elements, and is suitable for the reaction characteristics of various kinds of chemical precursors. It can achieve extremely high film quality on 12" silicon wafers. c. Customized contact lens technology ITRC relied on its optical element design and development, and integrated element manufacturing and testing capabilities to initiate the three-year international collaborative project "Ultra- Fluorescence imaging system jointly developed by ITRC and a corporate collaborator Support for Academic Research Ministry of Science and Technology 61